This paper focuses on the development of a low cost micromachined Corioles Vibrating Gyroscope (CVG) realized according to the decoupling principle DAVED-LL (Decoupled Angular Velocity Detector) where the two oscillation modes are of linear shape. By an optimised design the coupling of both oscillation modes can be suppressed, the so-called quadrature signal can be reduced signficantly and thus the sensor performance can be improved to meet the demands and specifications of automotive applications. The DAVED-LL prototypes show a rms noise in the range of 0.05 degree/s and a quadrature signal between 50 - 70 degree/s.


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    Title :

    Micromachined gyroscope in silicon-on-insulator (SOI) technology


    Additional title:

    Mikromaschinell hergestelltes Gyroskop in Silicon-on-Insulator (SOI)-Technologie


    Contributors:
    Gaisser, A. (author) / Frech, J. (author) / Hoelzer, G. (author) / Nommensen, P. (author) / Braxmaier, M. (author) / Link, T. (author) / Geiger, W. (author) / Schwarz, U. (author) / Sandmaier, H. (author) / Lang, W. (author)


    Publication date :

    2002


    Size :

    5 Seiten, 3 Bilder, 1 Tabelle, 8 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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