A new generation of pressure sensor ICs for automotive and industrial applications will be presented. Surface micromachined capacitive sensor cells are embedded into a standard BiCMOS-Process, yielding a monolithically integrated High-Pressure-Sensor-System. On-Chip signal conditioning includes functions such as detection of pressure dependent capacity, A/D conversion, digital calibration, temperature compensation, D/A reconversion and ratiometric analog output. The sensor systems are operating in pressure ranges up to 400 bar with an accuracy of 1.5 % in a premoulded DSOF-8 standard package. With several 40 bar and 200 bar sensor systems overpressure tests up to 600 bar were passed succesfully.


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    Title :

    Monolithic surface-micromachined sensor system for high pressure applications


    Additional title:

    Die monolithische Oberflächenbearbeitung von Sensorsystemen für Messungen bei hohen Drücken


    Contributors:
    Kapels, H. (author) / Aigner, R. (author) / Kolle, C. (author)


    Publication date :

    2001


    Size :

    4 Seiten, 9 Bilder, 1 Tabelle, 5 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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