An on-chip integrated piezoresistive pressure sensor with both voltage and frequency outputs has been developed. The sensor chip, having a size of 3x3.8 mm2, was realized by the use of a standard bipolar IC process. The output voltage span is 1 to 4 V for a pressure range of 0 to 750 mmHg. The pressure sensitivity of the voltage output is 4 mV/mmHg. The nonlinearity is less than 0.4 % of the full scale. The sensitivity of the frequency output is about 30 kHz for a 750 mmHg change in pressure. The output is in the T2L level. The temperature coefficient of the sensitivity is less than 0.06 % Cel in the temperature range -20 to 110 Cel.


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    Title :

    Integrated piezoresistive pressure sensor with both voltage and frequency output


    Additional title:

    Integrierter Piezowiderstandsdrucksensor mit Spannungs- und Frequenzausgang


    Contributors:
    Sugiyama, S. (author) / Takigawa, M. (author) / Igarashi, I. (author)

    Published in:

    Sensors and Actuators ; 4 , 1 ; 113-120


    Publication date :

    1983


    Size :

    8 Seiten, 8 Bilder, 11 Quellen



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




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