Integrated hybrid pressure sensor using a piezoresistive thickfilm sensor element
Integrierter Hybrid-Drucksensor unter Anwendung eines Druck/Widerstand Dickfilm-Sensorelements.
1987
6 pages
SAE-Paper;870286;1987;Sensors and Actuators 1987;SAE-Spec.Publ.; SP-693
Miscellaneous
English
Integrated Hybrid Pressure Sensor Using a Piezoresistive Thickfilm Sensor Element
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