This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high aspect ratio micromanipulator was fabricated using a high yield process with Deep Reactive Ion Etching (DRIE) on Silicon-On-Insulator (SOI) wafers, which produces larger electrostatic forces and requires lower actuation voltages compared to most existing electrostatic microactuators. A real-time sub-pixel parameterized feature tracking algorithm of ±8.4nm resolution is incorporated into the visual servoing loop. The resulting system is capable of visually servoing to a precision of ±20nm in two axes using the inexpensive bulk micromachined multi-axis electrostatic micromanipulator and standard microscope optics with a CCD camera. Potential applications of the system are in the manipulation of subcellular structures within biological cells, and microassembly of hybrid MEMS devices.


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    Title :

    A Visually Servoed MEMS Manipulator


    Contributors:


    Publication date :

    2003-06-30


    Size :

    10 pages





    Type of media :

    Article/Chapter (Book)


    Type of material :

    Electronic Resource


    Language :

    English




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