This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high aspect ratio micromanipulator was fabricated using a high yield process with Deep Reactive Ion Etching (DRIE) on Silicon-On-Insulator (SOI) wafers, which produces larger electrostatic forces and requires lower actuation voltages compared to most existing electrostatic microactuators. A real-time sub-pixel parameterized feature tracking algorithm of ±8.4nm resolution is incorporated into the visual servoing loop. The resulting system is capable of visually servoing to a precision of ±20nm in two axes using the inexpensive bulk micromachined multi-axis electrostatic micromanipulator and standard microscope optics with a CCD camera. Potential applications of the system are in the manipulation of subcellular structures within biological cells, and microassembly of hybrid MEMS devices.


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    Titel :

    A Visually Servoed MEMS Manipulator


    Beteiligte:
    Siciliano, Bruno (Herausgeber:in) / Dario, Paolo (Herausgeber:in) / Sun, Yu (Autor:in) / Greminger, Michael A. (Autor:in) / Potasek, David P. (Autor:in) / Nelson, Bradley J. (Autor:in)


    Erscheinungsdatum :

    30.06.2003


    Format / Umfang :

    10 pages





    Medientyp :

    Aufsatz/Kapitel (Buch)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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