Abstract Microcoils are significant components for micro magnetic sensors and actuators especially in biomedical devices such as micropumps. Non-spiral planar microcoil is an emerging type of planar microcoil which can reduce the overall device dimensions with an easier fabrication process. Coil inductance of the order of 1 mH and series resistance as low as 0.25 Ω are obtained. Non-spiral planar microcoils of the common square and circular geometries are studied here by analyzing their electrical parameters. Comparison between the experimental and theoretical model is also done. Inductance, series resistance and parasitic capacitance of circular and square non-spiral coil geometries are compared along with their magnetic field distributions. Results show that the circular non-spiral coil gives better performance over the square counterpart.
Microfabrication and Electrical Characterization of Non-spiral Planar Microcoils for Biomedical Applications
10th International Conference on Robotics, Vision, Signal Processing and Power Applications ; 2 ; 123-129
Lecture Notes in Electrical Engineering ; 547 , 2
2019-01-01
7 pages
Article/Chapter (Book)
Electronic Resource
English
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