In this article we will generalize and analyze different self-aligned techniques for different stripe lasers, for example: ridge waveguide lasers, buried heterostructure stripe lasers, mushroom-stripe lasers, etc. Finally, a novel self-aligned processing technique for fabricating buried mushroom-stripe lasers is proposed and it has been utilized successfully in fabricating bent waveguide mushroom-stripe MQW DFB lasers.
Self-aligned processing techniques for semiconductor stripe lasers
Semiconductor Lasers II ; 1996 ; Beijing,China
Proc. SPIE ; 2886
1996-09-24
Conference paper
Electronic Resource
English
Self-aligned processing techniques for semiconductor stripe lasers [2886-534]
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