A mini-excimer laser with a specially designed laser tube was operated at a constant energy of 8 mJ and a constant repetition rate of 500 Hz at 193 nm. A long-term test of this laser system was done. The output energy was constant over the test interval of 1.5 billion pulses. The pulse-to-pulse stability was constant over the total test period. The test was done without changing or cleaning the resonator optics.


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    Title :

    Results of a long-term test of an ArF mini-excimer laser


    Contributors:

    Conference:

    XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers ; 2002 ; Wroclow,Poland


    Published in:

    Publication date :

    2003-11-10





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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