A mini-excimer laser with a specially designed laser tube was operated at a constant energy of 8 mJ and a constant repetition rate of 500 Hz at 193 nm. A long-term test of this laser system was done. The output energy was constant over the test interval of 1.5 billion pulses. The pulse-to-pulse stability was constant over the total test period. The test was done without changing or cleaning the resonator optics.


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    Titel :

    Results of a long-term test of an ArF mini-excimer laser


    Beteiligte:
    Goertler, Andreas (Autor:in) / Hartmann, C. (Autor:in) / Strowitzki, C. (Autor:in)

    Kongress:

    XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers ; 2002 ; Wroclow,Poland


    Erschienen in:

    Erscheinungsdatum :

    2003-11-10





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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