We describe a semiconductor laser confocal interference microscope that is capable of producing both confocal images and high resolution surface profiles. The system is based on an optical fiber interferometer together with injection current modulation. We also address the issue of resolution in phase imaging.


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    Title :

    Semiconductor laser confocal and interference microscopy


    Contributors:

    Conference:

    Three-Dimensional Microscopy: Image Acquisition and Processing III ; 1996 ; San Jose,CA,United States


    Published in:

    Publication date :

    1996-04-10





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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