We describe a semiconductor laser confocal interference microscope that is capable of producing both confocal images and high resolution surface profiles. The system is based on an optical fiber interferometer together with injection current modulation. We also address the issue of resolution in phase imaging.
Semiconductor laser confocal and interference microscopy
Three-Dimensional Microscopy: Image Acquisition and Processing III ; 1996 ; San Jose,CA,United States
Proc. SPIE ; 2655
1996-04-10
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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