This paper describes an absolute semiconductor pressure sensor suitable for the engine control systems in automobiles. Using the passive (electrically nonconnected) side of a sensor chip as the pressure interface, it has good pressure media compatibility. But it requires a pedestal with a pressure inlet hole and a larger contact area for good sealed, vacuum reference, since the larger contact area causes a larger temperature shift of the offset voltage due to thermal stress. We have analyzed the thermal stress by the finite element method and have designed a lower, tubular pedestal with a groove which has isolated the sensor chip from the thermal stress more effectively.As a result, the sensor chip has been assembled in a standard TO-5 package and a temperature shift of the offset voltage within ±1% error of FS (Full Scale) without temperature compensation in the temperature range of -30°C to 100°C has been realized.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High Reliability Absolute Semiconductor Pressure Sensor


    Additional title:

    Sae Technical Papers


    Contributors:
    Horiike, H. (author) / Yamagami, K. (author) / Bessho, M. (author) / Jinmon, M. (author) / Wataya, S. (author) / Tsuru, Y. (author)

    Conference:

    SAE International Congress and Exposition ; 1983



    Publication date :

    1983-02-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    High reliability absolute semiconductor pressure sensor

    Bessho,M. / Tsuru,Y. / Horiike,H. et al. | Automotive engineering | 1983


    High reliability absolute semiconductor pressure sensors

    Bessho, M. / Tsuru, Y. / Horiike, H. | Tema Archive | 1983


    High Reliability Semiconductor Pressure Sensor for Automobiles

    Minorikawa, Hitoshi / Nishihara, Motohisa / Inui, Tomoji | SAE Technical Papers | 1982


    High reliability semiconductor pressure sensor for automobiles

    Inui,T. / Minorikawa,H. / Nishihara,M. et al. | Automotive engineering | 1982


    WEATHERIZED DIRECT-MOUNT ABSOLUTE PRESSURE SENSOR

    KWA TOM / DANIELSON DON L | European Patent Office | 2017

    Free access