A piezoresistive sensor assembly is provided that has a flex circuit having at least one air flow aperture formed therein. A sensor die is coupled to an absolute support and the flex circuit. The sensor die has a diaphragm that deflects in response to air flow that flows through the air flow aperture and is incident on the diaphragm. The sensor die includes one or more gages positioned on or in the diaphragm.
WEATHERIZED DIRECT-MOUNT ABSOLUTE PRESSURE SENSOR
DIREKT MONTIERBARER WETTERFESTER ABSOLUTDRUCKSENSOR
CAPTEUR DE PRESSION ABSOLUE À SUPPORT DIRECT RÉSISTANT AUX INTEMPÉRIES
2017-01-18
Patent
Electronic Resource
English
High Reliability Absolute Semiconductor Pressure Sensor
SAE Technical Papers | 1983
|High reliability absolute semiconductor pressure sensor
Automotive engineering | 1983
|