Endevco has developed the Model MSA100A micromachined servo accelerometer. It utilizes a force-balance approach that demonstrates superior performance over a conventional “open loop”. the accelerometer is small and rugged, with superior low frequency response down to DC. It has been optimized to provide low level measurements in the presence of severe vibrational inputs and temperatur e extremes after being subjected to large shock impacts.This paper details the design and operational features of the sensor element. The micromachined silicon sensor uses MEMS technology (microelectromechanical systems) in its fabrication. Also described is the electronic circuit used in the force-balance system, as well as the packaging of the accelerometer. Test results and application experience are presented.


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    Title :

    Micromachined Servo Accelerometer for Harsh Environments


    Additional title:

    Sae Technical Papers


    Contributors:

    Conference:

    SAE 2001 Noise & Vibration Conference & Exposition ; 2001



    Publication date :

    2001-04-30




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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