Endevco has developed the Model MSA100A micromachined servo accelerometer. It utilizes a force-balance approach that demonstrates superior performance over a conventional “open loop”. the accelerometer is small and rugged, with superior low frequency response down to DC. It has been optimized to provide low level measurements in the presence of severe vibrational inputs and temperatur e extremes after being subjected to large shock impacts.This paper details the design and operational features of the sensor element. The micromachined silicon sensor uses MEMS technology (microelectromechanical systems) in its fabrication. Also described is the electronic circuit used in the force-balance system, as well as the packaging of the accelerometer. Test results and application experience are presented.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Micromachined Servo Accelerometer for Harsh Environments


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:

    Kongress:

    SAE 2001 Noise & Vibration Conference & Exposition ; 2001



    Erscheinungsdatum :

    30.04.2001




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Micromachined Tunneling Accelerometer

    Kenny, Thomas W. / Waltman, Stephen B. / Kaiser, William J. et al. | NTRS | 1993



    Surface Micromachined Accelerometer: A Technology Update

    Dinsmore, Kristin A. / Payne, Richard S. | SAE Technical Papers | 1991



    IMAGING IN HARSH ENVIRONMENTS: Harsh environments dictate imaging-spectrometer design

    Bannon, D. / Thomas, R. | British Library Online Contents | 2005