This paper presents an approach for realizing active vibration isolation packaging, by integrating a micromachined electrostatic actuator with a micromachined mechanical lowpass vibration isolation filter, in order to realize a tunable filter structure. Although the electrostatic actuator can be used to adjust the filter resonant frequency, the primary application is for increasing the damping to an acceptable level. The physical size of these active filters is suitable for use in or as packaging for sensitive electronic and MEMS devices requiring vibration isolation. The resulting electromechanical system-in-a-package allows for optimum system performance through allowing the use of state of the art components in mechanically harsh environments. Numerous control laws can be implemented for active filter operation. However, semi-active damping, on-off skyhook control is particularly attractive for use with MEMS electrostatic actuators.
Active micromachined vibration isolation filters using electrostatic actuation to enhance packaging for mechanically harsh environments
Aktive mikrogefertigte Schwingungsfilter mit elektrostische Aktorik zum Schutz von MEMS-Komponenten in mechanisch rauen Umgebungen
2005
11 Seiten, 16 Bilder, 14 Quellen
Aufsatz (Konferenz)
Englisch
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