This paper reports on a new generation of silicon gyroscopes, which can be used as angular rate sensors for roll-over sensing or navigation control. The sensor is fabricated in standard Si-surface micromachining technology and encapsulated under vacuum conditions using an Si-micromachined cap wafer. The sensor consists of an electrostatically driven oscillating disk, which reacts with a tilt movement when an angular rate is applied due to the conservation law for angular momentums. The tilt movement is then detected capacitively by electrodes on the substrate underneath the oscillating disk. The sensor is packaged in a standard SMD housing (PLCC44).


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application


    Additional title:

    Sae Technical Papers


    Contributors:
    Thomae, A. (author) / Bischopink, G. (author) / Lorenz, G. (author) / Baumann, H. (author) / Emmerich, H. (author) / Marek, J. (author) / Mohaupt, J. (author) / Funk, K. (author) / Tanten, L. (author) / Lang, M. (author)

    Conference:

    International Congress & Exposition ; 1999



    Publication date :

    1999-03-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

    Thomae, A. / Schellin, R. / Lang, M. et al. | British Library Conference Proceedings | 1999


    A low cost angular rate sensor in si-surface micromachining technology for automotive application

    Thomae,A. / Schellin,R. / Lang,M. et al. | Automotive engineering | 1999


    Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications

    Golderer, W. et al. | British Library Conference Proceedings | 1998


    Angular Rate Sensor for Automotive Application

    Ichinose, T. / Terada, J. / SAE | British Library Conference Proceedings | 1995


    Angular rate sensor for automotive application

    Ichinose,T / Terada,J. / Matsushita Electronic Components,JP | Automotive engineering | 1995