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    Title :

    A low cost angular rate sensor in si-surface micromachining technology for automotive application


    Additional title:

    Ein preiswerter Winkelsensor in Feinstbearbeitungstechnik der Si-Oberflaeche fuer kraftfahrzeugtechnische Anwendung.


    Contributors:

    Publication date :

    1999


    Size :

    5 pages


    Remarks:

    SAE-Paper;1999-01-0931;1999;Sensors and Actuators 1999;SAE Spec.Publ.; SP-1443


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

    Thomae, A. / Bischopink, G. / Lorenz, G. et al. | SAE Technical Papers | 1999


    A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

    Thomae, A. / Schellin, R. / Lang, M. et al. | British Library Conference Proceedings | 1999


    Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications

    Golderer, W. et al. | British Library Conference Proceedings | 1998


    Angular rate sensor for automotive application

    Ichinose,T / Terada,J. / Matsushita Electronic Components,JP | Automotive engineering | 1995


    Angular Rate Sensor for Automotive Application

    Terada, Jiro / Ichinose, Toshihiko | SAE Technical Papers | 1995