Chemical vapor deposition of silicon from silane: Review of growth mechanisms and modeling/scaleup of fluidized bed reactors
Solar energy materials & solar cells ; 107 ; 188-201
2012
Article (Journal)
English
Chemical-vapor deposition of silicon from silane
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|Extracting Silicon Product From Fluidized-Bed Reactors
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|Chemical-Vapor Deposition Of Silicon Carbide
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|Development of fluidized bed reactors for silicon production
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|Fluidized-Bed Silane-Decomposition Reactor
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