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    Title :

    Chemical vapor deposition of silicon from silane: Review of growth mechanisms and modeling/scaleup of fluidized bed reactors



    Published in:

    Publication date :

    2012



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    50.70 Energie: Allgemeines / 52.56 Regenerative Energieformen, alternative Energieformen / 52.52 Thermische Energieerzeugung, Wärmetechnik / 53.36 Energiedirektumwandler, elektrische Energiespeicher



    Chemical-vapor deposition of silicon from silane

    Hsu, G. C. / Lutwack, R. / Praturi, A. K. | NTRS | 1979


    Extracting Silicon Product From Fluidized-Bed Reactors

    Hsu, G. C. / Rohatgi, N. K. / Morrison, A. D. | NTRS | 1986


    Chemical-Vapor Deposition Of Silicon Carbide

    Cagliostro, D. E. / Riccitiello, S. R. / Ren, J. et al. | NTRS | 1993



    Fluidized-Bed Silane-Decomposition Reactor

    Iya, Sridhar K. | NTRS | 1991