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    Title :

    Fabrication of nanoporous antireflection surfaces on silicon




    Publication date :

    2008



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    52.52 Thermische Energieerzeugung, Wärmetechnik / 50.70 Energie: Allgemeines / 52.56 Regenerative Energieformen, alternative Energieformen / 53.36 Energiedirektumwandler, elektrische Energiespeicher




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    Johnson, C. / Wydeven, T. / Donohoe, K. | NTRS | 1984



    Fabrication of a high aspect ratio nanoporous array on silicon

    Ho, J. Y. / Chang, K. J. / Wang, G. J. | British Library Online Contents | 2012