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    Title :

    Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD




    Publication date :

    1994



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher / 52.52 Thermische Energieerzeugung, Wärmetechnik / 52.56 Regenerative Energieformen, alternative Energieformen / 50.70 Energie: Allgemeines



    Properties Of Plasma-Deposited Amorphous Hydrogenated Carbon

    Miyoshi, Kazuhisa / Pouch, John J. / Alterovitz, Samuel A. | NTRS | 1992





    Hydrogenated amorphous silicon alloy deposition processes

    Luft, Werner / Tsuo, Y. Simon / Tsuo, Y. S. | TIBKAT | 1993