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    Title :

    Study of the solid phase crystallization behavior of amorphous sputtered silicon by X-ray diffraction and electrical measurements




    Publication date :

    2002



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English



    Classification :

    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher / 52.52 Thermische Energieerzeugung, Wärmetechnik / 52.56 Regenerative Energieformen, alternative Energieformen / 50.70 Energie: Allgemeines



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    Electrical field and stress effects on metal induced crystallization of sputtered silicon

    Ching-Ming Hsu, / lan-Fu Chen, / Ming-Chang Yu, | IEEE | 2003




    Magnetron-Sputtered Amorphous Metallic Coatings

    Thakoor, A. P. / Mehra, M. / Khanna, S. K. | NTRS | 1985