Micromachined Planar Vibratory Sensors With Mode Matching
NASA tech briefs ; 21 , 9 ; 73
1997
Article (Journal)
English
Micromachined Planar Vibratory Microgyroscopes
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Micromachined Siliçon Vibratory Three-Axis Accelerometer
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Planar Vibratory Microgyroscope: Alternative Configuration
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Micromachined sensors for advanced microsystems
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British Library Conference Proceedings | 2001
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