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    Title :

    Micromachined Planar Vibratory Sensors With Mode Matching


    Type of media :

    Article (Journal)


    Type of material :

    Print






    Micromachined sensors for advanced microsystems

    Sulouff, B. / Riedel, B. | Tema Archive | 2001


    Micromachined Sensors for Advanced Microsystems

    Sulouff, B. | British Library Conference Proceedings | 2001