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    Title :

    Design considerations and validation of the MSTAR absolute metrology system


    Contributors:

    Publication date :

    2004-08-02


    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English



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    J. E. Hanson / B. A. Jaroux | NTIS | 2014


    mSTAR Requirements and Reference Design

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    Absolute distance measurement with 0.1 /spl mu/m accuracy using the MSTAR sensor

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