An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.
Improved Controller for a Three-Axis Piezoelectric Stage
2009-09-01
Miscellaneous
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English
Improved Controller for a Three-Axis Piezoelectric Stage
Online Contents | 2009
NTRS | 1962
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