An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.


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    Title :

    Improved Controller for a Three-Axis Piezoelectric Stage


    Contributors:
    Rao, Shanti (author) / Palmer, Dean (author)


    Publication date :

    2009-09-01


    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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