An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.


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    Titel :

    Improved Controller for a Three-Axis Piezoelectric Stage


    Beteiligte:
    Rao, Shanti (Autor:in) / Palmer, Dean (Autor:in)


    Erscheinungsdatum :

    2009-09-01


    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :



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