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    Title :

    Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer


    Contributors:
    Yang, E. H. (author) / Wiberg, D. V. (author) / Dekany, R. G. (author)

    Conference:

    Transducers '01 Conference


    Publication date :

    2001-06-10


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English





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