Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01


    Contributors:
    Lawton, R. (author) / Lin, G. (author) / Wellman, J. (author)

    Publication date :

    2000-08-04


    Type of media :

    Preprint


    Type of material :

    No indication


    Language :

    English





    Reliability Testing of Polysilicon for MEMS Devices

    La Van, D. / Buchheit, T. / Aerospace Corporation | British Library Conference Proceedings | 1999


    UNRELEASED HAND BRAKE DETECTION UNIT AND RAILROAD CAR INCLUDING THE SAME

    SATO YOSHI / SEKIYA TAKAO / KUWASHIRO SHINGO | European Patent Office | 2019

    Free access

    Composite Metal-Polysilicon MEMS Actuators for Flow Control

    Bons, J. P. / Franke, M. E. / Borgeson, D. M. et al. | British Library Conference Proceedings | 2003


    Composite Metal-Polysilicon MEMS Actuators for Flow Control

    Bons, Jeffrey / Franke, Milton / Borgeson, David et al. | AIAA | 2003