Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
04.08.2000
Preprint
Keine Angabe
Englisch
Reliability Testing of Polysilicon for MEMS Devices
British Library Conference Proceedings | 1999
|UNRELEASED HAND BRAKE DETECTION UNIT AND RAILROAD CAR INCLUDING THE SAME
Europäisches Patentamt | 2019
|Composite Metal-Polysilicon MEMS Actuators for Flow Control
British Library Conference Proceedings | 2003
|