Miniature capacitors containing multiple alternating thin-film dielectric and metal layers proposed, especially for use in integrated and hybrid electronic circuits. Because capacitance inversely proportional to thickness of dielectric layers, use of thin, high-quality dielectric layers affords capacitance and energy-storage densities much greater than now available. These devices much smaller and more reliable than state-of-art capacitors.


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    Title :

    Multilayer Thin-Film Microcapacitors


    Contributors:

    Published in:

    Publication date :

    1995-09-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English






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