Miniature capacitors containing multiple alternating thin-film dielectric and metal layers proposed, especially for use in integrated and hybrid electronic circuits. Because capacitance inversely proportional to thickness of dielectric layers, use of thin, high-quality dielectric layers affords capacitance and energy-storage densities much greater than now available. These devices much smaller and more reliable than state-of-art capacitors.
Multilayer Thin-Film Microcapacitors
NASA Tech Briefs ; 19 , 9
1995-09-01
Miscellaneous
No indication
English
Fabrication of all-solid-state electrochemical microcapacitors
Online Contents | 2004
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