Miniature capacitors containing multiple alternating thin-film dielectric and metal layers proposed, especially for use in integrated and hybrid electronic circuits. Because capacitance inversely proportional to thickness of dielectric layers, use of thin, high-quality dielectric layers affords capacitance and energy-storage densities much greater than now available. These devices much smaller and more reliable than state-of-art capacitors.


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    Titel :

    Multilayer Thin-Film Microcapacitors


    Beteiligte:
    Thakoor, Sarita (Autor:in) / Thakoor, Anil (Autor:in) / Karmon, Dan (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    1995-09-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch






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