Technique shows promise for fabrication of novel electronic, optoelectronic, and electro-optical devices. Experiments demonstrated feasibility of growing microscopic single-crystal CoSi2 structures beneath surfaces of Si substrates.


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    Title :

    Subsurface Growth Of Silicide Structures In Silicon


    Contributors:

    Published in:

    Publication date :

    1993-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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