Si/IrSi or Si/IrSi3 Schottky-barrier detector fabricated by stoichiometric codeposition of Ir and Si on p Si substrate. Includes p+ substrate contact, silicide electrode, and n Si guard ring, which suppresses leakage around periphery of silicide electrode. Part of continuing effort to develop imaging arrays of Schottky-barrier detectors operating at far-infrared wavelengths.


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    Title :

    Si/IrSi3 Schottky-Barrier Infrared Detectors


    Contributors:

    Published in:

    Publication date :

    1991-12-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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