Quantum efficiency increased. Proposed Schottky-barrier infrared detector has double metallic layer of Ir and IrSi3 instead of single metallic layer of Ir, IrSi, or IrSi3. Offers advantages of both relatively high infrared absorption in thin film of Ir and stability and reproducibility of layer of IrSi3 in contact with Si. Also serves as barrier to chemical reactions between Ir overlayer and Si substrate. Detectors used to form focal-plane array integrated with charge-coupled-device-addressing and image-processing circuitry.


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    Title :

    Ir/IrSi3/Si Schottky-Barrier Infrared Detector


    Contributors:

    Published in:

    Publication date :

    1991-10-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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