Equations derived to estimate obscuration ratios of surfaces contaminated by particles. Ratio is fraction of surface area covered by particles. Useful as index of cleanliness in clean-room operations in manufacturing of semiconductor devices, magnetic recording media, optical devices, and pharmaceutical and biotechnological products.
Calculating Obscuration Ratios Of Contaminated Surfaces
NASA Tech Briefs ; 13 , 8
1989-08-01
Miscellaneous
No indication
English