Equations derived to estimate obscuration ratios of surfaces contaminated by particles. Ratio is fraction of surface area covered by particles. Useful as index of cleanliness in clean-room operations in manufacturing of semiconductor devices, magnetic recording media, optical devices, and pharmaceutical and biotechnological products.


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    Title :

    Calculating Obscuration Ratios Of Contaminated Surfaces


    Contributors:

    Published in:

    Publication date :

    1989-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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