Heat shield permits enhancement of exit cooling without formation of unwanted crystals. Thermal barrier between molten silicon and lid of susceptor and crucible allows solidifying ribbon of silicon to be withdrawn faster. Barrier, or sublid, increases production rate.
Sublid Speeds Growth Of Silicon Ribbon
NASA Tech Briefs ; 12 , 4
1988-04-01
Miscellaneous
No indication
English
Starting Silicon-Ribbon Growth Automatically
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|Adjustable Lid Aids Silicon-Ribbon Growth
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