Heat shield permits enhancement of exit cooling without formation of unwanted crystals. Thermal barrier between molten silicon and lid of susceptor and crucible allows solidifying ribbon of silicon to be withdrawn faster. Barrier, or sublid, increases production rate.


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    Title :

    Sublid Speeds Growth Of Silicon Ribbon


    Contributors:

    Published in:

    Publication date :

    1988-04-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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