Heat shield permits enhancement of exit cooling without formation of unwanted crystals. Thermal barrier between molten silicon and lid of susceptor and crucible allows solidifying ribbon of silicon to be withdrawn faster. Barrier, or sublid, increases production rate.
Sublid Speeds Growth Of Silicon Ribbon
NASA Tech Briefs ; 12 , 4
1988-04-01
Sonstige
Keine Angabe
Englisch
Starting Silicon-Ribbon Growth Automatically
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|Preventing Freezeup in Silicon Ribbon Growth
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|Numerical Simulation Of Silicon-Ribbon Growth
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|Faster Edge-Define Silicon-Ribbon Growth
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|Adjustable Lid Aids Silicon-Ribbon Growth
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|