Impurities detected nondestructively during processing. In proposed system, surface of growing amorphous-silicon film monitored by ellipsometer at wavelength or combination of wavelengths at which impurity or impurities of interest absorb light strongly.
Ellipsometric Monitoring of Film Deposition
NASA Tech Briefs ; 10 , 4
1986-07-01
Miscellaneous
No indication
English
Ellipsometric measurements for thin-film-based sensor systems [2509-10]
British Library Conference Proceedings | 1995
|Micro-ellipsometric true topography
British Library Conference Proceedings | 1996
|In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]
British Library Conference Proceedings | 2000
|Gold Nanoparticle Labels Amplify Ellipsometric Signals
Online Contents | 2008
Force measuring sensor applying transmission ellipsometric principles
British Library Conference Proceedings | 1990
|