System under development reduces equipment costs. Processing system will produce solar-cell junctions on 4 in. (10.2 cm) round silicon wafers at rate of 10 to seventh power per year. System includes non-mass-analyzed ion implanter, microcomputer-controlled, pulsed-electron-beam annealer, and wafertransport system with vacuum interlock. These features eliminate large, expensive magnet and plates, circuitry, and power source otherwise needed for scanning.


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    Title :

    Solar-Cell-Junction Processing System


    Contributors:

    Published in:

    Publication date :

    1986-06-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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