System under development reduces equipment costs. Processing system will produce solar-cell junctions on 4 in. (10.2 cm) round silicon wafers at rate of 10 to seventh power per year. System includes non-mass-analyzed ion implanter, microcomputer-controlled, pulsed-electron-beam annealer, and wafertransport system with vacuum interlock. These features eliminate large, expensive magnet and plates, circuitry, and power source otherwise needed for scanning.


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    Titel :

    Solar-Cell-Junction Processing System


    Beteiligte:
    Bunker, S. N. (Autor:in) / Armini, A. J. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    1986-06-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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