Four-volume document reviews key technologies for interconnecting in very-large-scale integrated (VLSI) circuits. Document also discusses current and proposed research into novel fabrication techniques for interconnections.


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    Title :

    Processes for VLSI Circuits


    Contributors:
    Wade, T. E. (author)

    Published in:

    Publication date :

    1984-12-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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