Improved hollow cathode for neutral-beam injector ion sources rapidly started by dielectric breakdown of ignitor plug located at one end of open ended tube. Used in low-current ion implantation, milling, sputtering, and bombardment for surface treatment.


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    Title :

    Improved Hollow Cathode


    Contributors:
    Aston, G. (author)

    Published in:

    Publication date :

    1984-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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