Packed-bed reactor produces silicon by decomposing ultrapure silane gas in temperature gradient. Based on previous experiments with relatively low decomposition temperatures and with temperature gradients, heterogeneous decomposition will produce few fines. Fines produced are screened out and reinserted into furnace.


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    Title :

    Tube-Furnace Production of Silicon


    Contributors:
    Farrier, E. G. (author) / Rexer, J. (author) / Timmel, P. J. (author)

    Published in:

    Publication date :

    1982-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


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