Packed-bed reactor produces silicon by decomposing ultrapure silane gas in temperature gradient. Based on previous experiments with relatively low decomposition temperatures and with temperature gradients, heterogeneous decomposition will produce few fines. Fines produced are screened out and reinserted into furnace.
Tube-Furnace Production of Silicon
NASA Tech Briefs ; 7 , 1
01.03.1982
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Englisch
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