The invention provides an automatic extraction device for a graphite furnace tube in a vertical deposition furnace. The automatic extraction device comprises a rack, a lifting frame, a three-stage telescopic arm, a pneumatic expansion claw and a three-stage telescopic arm driving assembly. And the lifting frame is connected above the supporting surface of the rack. The upper end of the third-level telescopic arm is connected with the lifting frame, the lower end of the third-level telescopic arm is connected with the pneumatic expansion claw, and the third-level telescopic arm is located on the side edge of the machine frame. And the third-stage telescopic arm driving assembly is connected with the third-stage telescopic arm. And the pneumatic expansion claws are controlled by compressed air. And the third-stage telescopic arm is configured to be adjustable in length and is used for moving the pneumatic expansion claw onto the graphite furnace tube. And the pneumatic expansion claw is used for grabbing the graphite furnace tube. According to the automatic extraction device, the lifting frame, the three-stage telescopic arm, the pneumatic expansion claw and the three-stage telescopic arm driving assembly in the automatic extraction device are mutually matched for operation, so that the problems that the labor intensity is high, dust pollution is large, and the graphite furnace tube is prone to being squeezed, collided and damaged when the graphite furnace tube in the deposition furnace is manually extracted are solved.
本申请提供了一种用于立式沉积炉中石墨炉管的自动化提取装置,包括机架、提升架、三级伸缩臂、气动膨胀爪和三级伸缩臂驱动组件。提升架连接在机架的支撑面上方。三级伸缩臂的上端与提升架连接,三级伸缩臂的下端与气动膨胀爪连接,且三级伸缩臂位于机架的侧边。三级伸缩臂驱动组件与三级伸缩臂连接。气动膨胀爪通过压缩空气控制。三级伸缩臂配置为长度可调节,且用于将气动膨胀爪移动至石墨炉管上。气动膨胀爪用于抓取石墨炉管。本申请通过利用自动化提取装置中提升架、三级伸缩臂、气动膨胀爪和三级伸缩臂驱动组件的相互配合操作,以解决人工提取沉积炉中石墨炉管的劳动强度高、粉尘污染大、石墨炉管易挤碰破损的问题。
Automatic extraction device for graphite furnace tube in vertical deposition furnace
一种用于立式沉积炉中石墨炉管的自动化提取装置
07.03.2025
Patent
Elektronische Ressource
Chinesisch
Semi-automatic furnace tube loading and unloading equipment
Europäisches Patentamt | 2024
|Semi-automatic furnace tube loading and unloading equipment
Europäisches Patentamt | 2024
|Furnace tube fixing structure of conversion furnace of conversion hydrogen production device
Europäisches Patentamt | 2023
|Vertical bright annealing furnace muffle tube replacement system and replacement method
Europäisches Patentamt | 2023
|