"Melt recharger" adds raw silicon to crucible in crystal-growing furnace without disturbing inert-gas atmosphere or significantly lowering temperature of melt. Crucible-refill hopper is lowered into hot zone of crystal-pulling chamber through an isolation valve. Cable that supports hopper is fastened to cone-shaped stopper in bottom of hopper. Stopper moves out of opening in hopper, allowing part of polysilicon charge to drop into crucible.


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    Title :

    Recharging the Silicon Crucible in a Hot Furnace


    Contributors:
    Lane, R. L. (author)

    Published in:

    Publication date :

    1982-09-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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