"Melt recharger" adds raw silicon to crucible in crystal-growing furnace without disturbing inert-gas atmosphere or significantly lowering temperature of melt. Crucible-refill hopper is lowered into hot zone of crystal-pulling chamber through an isolation valve. Cable that supports hopper is fastened to cone-shaped stopper in bottom of hopper. Stopper moves out of opening in hopper, allowing part of polysilicon charge to drop into crucible.


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    Titel :

    Recharging the Silicon Crucible in a Hot Furnace


    Beteiligte:
    Lane, R. L. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.09.1982



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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