"Melt recharger" adds raw silicon to crucible in crystal-growing furnace without disturbing inert-gas atmosphere or significantly lowering temperature of melt. Crucible-refill hopper is lowered into hot zone of crystal-pulling chamber through an isolation valve. Cable that supports hopper is fastened to cone-shaped stopper in bottom of hopper. Stopper moves out of opening in hopper, allowing part of polysilicon charge to drop into crucible.
Recharging the Silicon Crucible in a Hot Furnace
NASA Tech Briefs ; 6 , 1
01.09.1982
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Englisch
Automatic discharging method for graphitization furnace crucible
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