Rotating substrate and slotted mask allow varying film thickness to be deposited from vapor by exposing film substrate to metal vapor through circular mask. Useful for fabricating variable thickness coatings for controlling thermal, electrical, or other properties.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Vapor-deposited graded-thickness films


    Contributors:
    Herzig, H. (author) / Spencer, R. S. (author)

    Published in:

    Publication date :

    1979-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




    Friction Characteristics of Vapor Deposited Lubricant Films

    Klaus, E. E. / Bruce, R. W. / Gunsel, Selda | SAE Technical Papers | 1989


    Friction characteristics of vapor deposited lubricant films

    Gunsel,S. / Klaus,E.E. / Bruce,R.W. et al. | Automotive engineering | 1989


    Aerosol-Assisted Chemical Vapor Deposited Thin Films for Space Photovoltaics

    Hepp, Aloysius / McNatt, Jeremiah / Dickman, John et al. | AIAA | 2006


    Advanced Graded Protective Coatings, Deposited by EB-PVD

    Movchan, B. A. / Yakovchuk, K. Y. | British Library Conference Proceedings | 2007


    Chemically vapor deposited materials for railguns

    Harding, J.T. / Kaplan, R.B. / Pierson, H.O. et al. | Tema Archive | 1986