Rotating substrate and slotted mask allow varying film thickness to be deposited from vapor by exposing film substrate to metal vapor through circular mask. Useful for fabricating variable thickness coatings for controlling thermal, electrical, or other properties.


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    Titel :

    Vapor-deposited graded-thickness films


    Beteiligte:
    Herzig, H. (Autor:in) / Spencer, R. S. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.08.1979



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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    Aerosol-Assisted Chemical Vapor Deposited Thin Films for Space Photovoltaics

    Hepp, Aloysius / McNatt, Jeremiah / Dickman, John et al. | AIAA | 2006


    Advanced Graded Protective Coatings, Deposited by EB-PVD

    Movchan, B. A. / Yakovchuk, K. Y. | British Library Conference Proceedings | 2007